Polymers such as PMMA, PADC (commercially named CR39), BCB .. . under irradiation (gamma rays, ion beam. ..) have
been widely studied. It has been shown that they undergo physical and particularly optical change. In the case of ion beam, an
optical waveguiding is generated, due to a sufficient localized refractive index increase.
In this work, an electron beam (EB) delivered by a Scanning Electron Microscope (SEM) is used. We show that this kind of
irradiation also allows to create a guiding layer on the PADC polymer. Taking into account that the minimum spot size is
5 nm and that a specific Computer Aided Design (CAD) application, developed in the group, drives the SEM, we can expect
to realize optical microstructures directly on the substrate, with an excellent lateral resolution.
The first step of this study is the demonstration of the feasibility of optical waveguides in PADC by the EB techniques, with
the aim to apply this method to the field ofinterconnect and optoelectronic devices for Telecommunications.
The influence of the main irradiation parameters (energy of the electrons and electronic fluence) on optical characteristics is
The CAD application driving the SEM allows to write various stmctures such as gratings, microguides, discs as well as any
combinations ofthese elementary structures in order to achieve microoptical devices.
We focused on a microguide structure which behavior is simulated with the intention of optimizing its dimensions and the
required refractive index variation. Some modeling results giving the energy repartition in the structure are presented.