15 December 2000 Effect of stress on silicon oxynitride optical waveguides
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Proceedings Volume 4087, Applications of Photonic Technology 4; (2000) https://doi.org/10.1117/12.406401
Event: 2000 International Conference on Application of Photonic Technology (ICAPT 2000), 2000, Quebec City, Canada
Abstract
An integrated optical demultiplexer is an ideal device for the measurement of the effect of strain (or, equivalently, stress) on birefringence. We fabricated optical demultiplexers from silicon oxynitride optical waveguides and measured the strain dependence of the passband wavelengths. From the shift in the passband wavelength, we determined the strain dependence of the effective index for the silicon oxynitride waveguide.
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Yitao Sun, Yitao Sun, K. A. McGreer, K. A. McGreer, James N. Broughton, James N. Broughton, } "Effect of stress on silicon oxynitride optical waveguides", Proc. SPIE 4087, Applications of Photonic Technology 4, (15 December 2000); doi: 10.1117/12.406401; https://doi.org/10.1117/12.406401
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