High-precision microcutting of ceramics with short-pulsed solid state lasers

Joachim Radtke; Tobias Abeln; Michael Weikert; Friedrich Dausinger

doi:10.1117/12.405713

6 November 2000 High-precision microcutting of ceramics with short-pulsed solid state lasers

Joachim Radtke, Tobias Abeln, Michael Weikert, Friedrich Dausinger

Proceedings Volume 4088, First International Symposium on Laser Precision Microfabrication; (2000) https://doi.org/10.1117/12.405713
Event: First International Symposium on Laser Precision Microfabrication (LPM2000), 2000, Omiya, Saitama, Japan

Abstract

This contribution will present results for high-precision cutting of technical ceramics with short-pulsed solid-state lasers in fundamental and frequency-doubled wavelength. On the basis of ample experiments, a surprising absorption behavior of some ceramics in the case of irradiation with high intensity will be discussed. Furthermore, the influence of wavelength and process gas on cutting speed and quality is demonstrated. The investigations resulted in a process strategy with multiple passing over of the kerf suited for remarkably improving process velocity and quality. Finally, structures applicable for nozzles and spinnerets are shown.

Citation Download Citation

Joachim Radtke, Tobias Abeln, Michael Weikert, and Friedrich Dausinger "High-precision microcutting of ceramics with short-pulsed solid state lasers", Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); https://doi.org/10.1117/12.405713

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