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6 November 2000 Laser-induced microstructuring of photonic materials: semiconductors
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Proceedings Volume 4088, First International Symposium on Laser Precision Microfabrication; (2000) https://doi.org/10.1117/12.405689
Event: First International Symposium on Laser Precision Microfabrication (LPM2000), 2000, Omiya, Saitama, Japan
Abstract
The laser has become an increasingly important tool, which helps to overcome the limitations of conventional microfabrication technologies, delivering devices capable of performing new and increased numbers of operations within an ever shrinking volume. In addition to classical applications of lasers such as via hold drilling, trimming or pulsed laser deposition of thin films, there have been new developments in laser-based technologies for the fabrication of advanced micro- and nano-devices. Of particular interest for optoelectronic and photonic applications is the potential for commercial processing of semiconductors and the fabrication of integrated and monolithically integrated photonic devices and circuits.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jan J. Dubowski "Laser-induced microstructuring of photonic materials: semiconductors", Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); https://doi.org/10.1117/12.405689
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