Laser processing of convex structures in chalcogenide glasses

Tamihiro Gotoh; Keiji Tanaka

doi:10.1117/12.405728

6 November 2000 Laser processing of convex structures in chalcogenide glasses

Tamihiro Gotoh, Keiji Tanaka

Proceedings Volume 4088, First International Symposium on Laser Precision Microfabrication; (2000) https://doi.org/10.1117/12.405728
Event: First International Symposium on Laser Precision Microfabrication (LPM2000), 2000, Omiya, Saitama, Japan

Abstract

Micron-scale convex deformations can be produced in two kinds of chalcogenide glasses only by exposures to focused cw laser beams. In covalent compounds such as As₂S₃ the deformation is formed through the so-called giant photoexpansion phenomenon, and in Ag-containing chalcogenide glasses it is made through photinduced accumulation of Ag⁺ ions. These phenomena are promising for fabrication of micro optical components.

Citation Download Citation

Tamihiro Gotoh and Keiji Tanaka "Laser processing of convex structures in chalcogenide glasses", Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); https://doi.org/10.1117/12.405728

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