6 November 2000 Matrix-assisted laser transfer of electronic materials for direct-write applications
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Proceedings Volume 4088, First International Symposium on Laser Precision Microfabrication; (2000) https://doi.org/10.1117/12.405735
Event: First International Symposium on Laser Precision Microfabrication (LPM2000), 2000, Omiya, Saitama, Japan
Abstract
A novel laser-based direct-write technique, called Matrix Assisted Pulsed Laser Evaporation Direct Write (MAPLE-DW), has been developed for the rapid prototyping of electronic devices. MAPLE-DW is a maskless deposition process operating under ambient conditions which allows for the rapid fabrication of complex patterns of electronic materials. The technique utilizes a laser transparent substrate with one side coated with a matrix of the materials of interest mixed with an organic vehicle. The laser is focused through the transparent substrate onto the matrix coating which aids in transferring the materials of interest to an acceptor substrate placed parallel to the matrix surface. With MAPLE-DW, diverse materials including metals, dielectrics, ferroelectrics, ferrites and polymers have been transferred onto various acceptor substrates. The capability for laser-modifying the surface of the acceptor substance and laser-post-processing the transferred material has been demonstrated as well. This simple yet powerful technique has been used to fabricate passive thin film electronic components such as resistors, capacitors and metal lines with good functional properties. An overview of these key results along with a discussion of their materials and properties characterization will be presented.
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Raymond C. Y. Auyeung, H. D. Wu, R. Modi, Alberto Pique, J. M. Fitz-Gerald, Henry D. Young, Samuel Lakeou, Russell Chung, Douglas B. Chrisey, "Matrix-assisted laser transfer of electronic materials for direct-write applications", Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); doi: 10.1117/12.405735; https://doi.org/10.1117/12.405735
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