Micromachining with ultrafast lasers

Kazuhiko Shihoyama; A. Furukawa; Philippe Bado; Ali A. Said

doi:10.1117/12.405701

6 November 2000 Micromachining with ultrafast lasers

Kazuhiko Shihoyama, A. Furukawa, Philippe Bado, Ali A. Said

Proceedings Volume 4088, First International Symposium on Laser Precision Microfabrication; (2000) https://doi.org/10.1117/12.405701
Event: First International Symposium on Laser Precision Microfabrication (LPM2000), 2000, Omiya, Saitama, Japan

Abstract

Conventional laser machining is based on continuous-wave or long-pulse lasers. With these lasers, thermal diffusion limits the accuracy and the reproducibility of the machining process. Laser-matter interaction is fundamentally different in the ultrafast (femtosecond) regime. This discovery has opened the way for generalized fine laser micromachining.

Citation Download Citation

Kazuhiko Shihoyama, A. Furukawa, Philippe Bado, and Ali A. Said "Micromachining with ultrafast lasers", Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); https://doi.org/10.1117/12.405701

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