6 November 2000 Micromachining with ultrafast lasers
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Proceedings Volume 4088, First International Symposium on Laser Precision Microfabrication; (2000) https://doi.org/10.1117/12.405701
Event: First International Symposium on Laser Precision Microfabrication (LPM2000), 2000, Omiya, Saitama, Japan
Abstract
Conventional laser machining is based on continuous-wave or long-pulse lasers. With these lasers, thermal diffusion limits the accuracy and the reproducibility of the machining process. Laser-matter interaction is fundamentally different in the ultrafast (femtosecond) regime. This discovery has opened the way for generalized fine laser micromachining.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kazuhiko Shihoyama, Kazuhiko Shihoyama, A. Furukawa, A. Furukawa, Philippe Bado, Philippe Bado, Ali A. Said, Ali A. Said, } "Micromachining with ultrafast lasers", Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); doi: 10.1117/12.405701; https://doi.org/10.1117/12.405701
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