6 November 2000 Optical radiation pressure micromachining using a small particle
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Proceedings Volume 4088, First International Symposium on Laser Precision Microfabrication; (2000) https://doi.org/10.1117/12.405733
Event: First International Symposium on Laser Precision Microfabrication (LPM2000), 2000, Omiya, Saitama, Japan
Abstract
This paper presents a new micro-machining using optical radiation pressure induced by incident laser light, which is based on laser trapping technology. In order to verify the feasibility of our proposed new micro-machining, we construct the experimental system and carry out the fundamental experiments. As a result, we found that the proposed micro-machining will make it possible to remove effectively the surface up to the depth of several nm using the particles trapped by the optical radiation pressure, even if the pressure force is as small as 0.1nN.
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Hiroki Shimizu, Hiroki Shimizu, Takashi Miyoshi, Takashi Miyoshi, Satoshi Kiyono, Satoshi Kiyono, } "Optical radiation pressure micromachining using a small particle", Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); doi: 10.1117/12.405733; https://doi.org/10.1117/12.405733
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