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6 November 2000 Overview of laser microprocessing: fundamentals, practical applications, and future prospects
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Proceedings Volume 4088, First International Symposium on Laser Precision Microfabrication; (2000) https://doi.org/10.1117/12.405694
Event: First International Symposium on Laser Precision Microfabrication (LPM2000), 2000, Omiya, Saitama, Japan
Abstract
Today the laser technologies are widely used in the processing of materials, including also the precise micro shaping. Deep UV lasers have very good prospects in the lithography, used for fabrication of chips, while the femtosecond pused lasers open the new horizons for the micro- and submicroprofiling. But these are the field of the future prospects. As for today state-of-the-art, contribution to the application of lasers for these purposes are the numerous advantages of the laser techniques over the traditional methods, such as: - wide variety of materials to be treated, - possibility of achieving narrow cuts and practically waste-fee separation, - small heat-affected zone, - minimal mechanical effect and minimum thermal deformations, - possibility of micro shaping along a complex profile in two, or even three, dimensions, - possibility of fast and precise process switch-on and off and to include in the processing feedback on the treated parameters.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vadim P. Veiko "Overview of laser microprocessing: fundamentals, practical applications, and future prospects", Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); https://doi.org/10.1117/12.405694
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