6 November 2000 Three-dimensional microassembling technique applying laser trapping
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Proceedings Volume 4088, First International Symposium on Laser Precision Microfabrication; (2000) https://doi.org/10.1117/12.405762
Event: First International Symposium on Laser Precision Microfabrication (LPM2000), 2000, Omiya, Saitama, Japan
Abstract
A new manipulation technique using Q-Switched laser beam was developed in this research. By using which, we could trap a fine particle in the air with relatively lower laser output. In order to clarify the possibility of the application of this method in micro-machining, the assembly experiments were conducted and the experimental results showed that the three dimensional microstructure from fine particles can be realized by this technique.
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Daisuke Sawaki, Daisuke Sawaki, Junich Ikeno, Junich Ikeno, Osamu Horiuchi, Osamu Horiuchi, Toshio Kasai, Toshio Kasai, } "Three-dimensional microassembling technique applying laser trapping", Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); doi: 10.1117/12.405762; https://doi.org/10.1117/12.405762
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