24 May 2000 Polymer microlens arrays fabricated using the hydrophobic effect
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Proceedings Volume 4089, Optics in Computing 2000; (2000) https://doi.org/10.1117/12.386869
Event: 2000 International Topical Meeting on Optics in Computing (OC2000), 2000, Quebec City, Canada
We report a means of fabricating hydrophilic domains in a hydrophobic background by lithographically patterning an adhesive hydrophobic layer. Organic polymer microlenses have been fabricated on these substrates using a dip-coating technique. Various lens shapes (circular, elliptical, square) have been fabricated on a variety of substrates (SiO2, SiN, GaAs, InP, etc), ranging in size from 2 - 500 micrometers in diameter, and having fill factors of up to 90%. Plano-convex and double-convex lenses have been fabricated as fast as f/1.38 and f/1.2, respectively. The performance of arrays of these microlenses was quantitatively analyzed and optimized.
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Daniel M. Hartmann, Daniel M. Hartmann, Osman Kibar, Osman Kibar, Sadik C. Esener, Sadik C. Esener, } "Polymer microlens arrays fabricated using the hydrophobic effect", Proc. SPIE 4089, Optics in Computing 2000, (24 May 2000); doi: 10.1117/12.386869; https://doi.org/10.1117/12.386869

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