18 September 2000 Further advances in electron beam recording
Author Affiliations +
Proceedings Volume 4090, Optical Data Storage 2000; (2000) https://doi.org/10.1117/12.399334
Event: Optical Data Storage, 2000, Whistler, BC, Canada
Abstract
Our development of a production Electron Beam Recorder designed for making masters for optical discs of up to 100 gigabytes capacity is discussed. A second-generation electron beam column for this machine will also be discussed and some recent results of optical discs ranging in capacity from 4.7 GB to 100 GB will be presented.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gerald Reynolds, Gerald Reynolds, Giles Cartwright, Giles Cartwright, "Further advances in electron beam recording", Proc. SPIE 4090, Optical Data Storage 2000, (18 September 2000); doi: 10.1117/12.399334; https://doi.org/10.1117/12.399334
PROCEEDINGS
10 PAGES


SHARE
RELATED CONTENT

In-line LOCOS active width characterization using surface SEM
Proceedings of SPIE (September 14 1995)
Copy result exactly using EB-SCOPE technology
Proceedings of SPIE (June 01 2003)
Further advances in electron beam recording
Proceedings of SPIE (February 06 2001)

Back to Top