24 October 2000 Generalized method for designing concave gratings for microspectrometer
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Abstract
Traditional Rowland-circle concave gratings suffer large aberrations especially in the case of flat-field receiving. With the development of vertical photolithography, the fabrication of gratings with arbitrary profile and groove distribution comes into practice. To overcome the restrictions existing in the traditional geometries, a general iterative design geometry based on the optical path function is developed in this paper. The structure of a grating is determined by two explicit of implied constraint equations containing the grating profile and the groove function. Constraints in some typical cases are studied. Finally some numerical examples of flat-field concave gratings for micro-spectrometer are shown by the proposed equations. The aberration of the device based on stigmatic points can be lower than λ/4.
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Daoyi Wang, Daoyi Wang, Yingbai Yan, Yingbai Yan, Guofan Jin, Guofan Jin, Qingsheng He, Qingsheng He, } "Generalized method for designing concave gratings for microspectrometer", Proc. SPIE 4093, Current Developments in Lens Design and Optical Systems Engineering, (24 October 2000); doi: 10.1117/12.405243; https://doi.org/10.1117/12.405243
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