24 October 2000 Optimization and fabrication of micro diffractive lens arrays for biochip application
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Abstract
In the latest ten years, great efforts have been taken to miniaturize the biochemical and chemical analysis systems, and many kinds of biochips with functions of biology sample preparing, chemical assay reacting and result detecting, or mixture of some of these functions have been reported. An aspherical micro lens array with large numerous aperture is developed for a biosensor to achieve high fluorescence collection and high sensitivity. The optimized design and fabrication with new organic-inorganic sol-gel materials of micro lens arrays are discussed in this paper. Because of merits of micro size, low cost, facility to reproduce, flexibility to design and multi-channels detection, these elements are suitable to form a compact, multi-channel fluorescence biosensor that can address multiple biology samples simultaneously without loss in detection sensitivity. Packaging and alignment strategies for a sensor consist of micro lens arrays detecting fluorescence labeled DNA assay arrays are also presented, which is promising to be integrated into a micro total analysis system (u-TAS).
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Rong Yang, Lin Pang, Minxian Wu, Guofan Jin, "Optimization and fabrication of micro diffractive lens arrays for biochip application", Proc. SPIE 4093, Current Developments in Lens Design and Optical Systems Engineering, (24 October 2000); doi: 10.1117/12.405216; https://doi.org/10.1117/12.405216
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KEYWORDS
Biosensors

Luminescence

Chemical analysis

Lithography

Photomasks

Optical filters

Sol-gels

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