19 October 2000 Protective coatings for Al metallizations obtained by plasma polymerization
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Abstract
Plasma polymerized hexamethyldisiloxane (PP-HMDSO) thin films have been obtained in a DC glow discharge from oxygen/HMDSO gas mixtures. Such films are successfully applied to the pr otection of Al metallisations on plastic substrates. The composition of the films (SiOxCy:H) may be varied from organic (polymer-like) to inorganic (SiO2-like) by varying the oxygen-to-monomer ration in the precursor gas mixture. The structural and functional properties of the films are studied as a function of the plasma parameters.
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Jaume Esteve, Jaume Esteve, Francesc Benitez, Francesc Benitez, Salvador Bosch, Salvador Bosch, Elena Martinez, Elena Martinez, Miquel Galan, Miquel Galan, Jordi Serrat, Jordi Serrat, "Protective coatings for Al metallizations obtained by plasma polymerization", Proc. SPIE 4094, Optical and Infrared Thin Films, (19 October 2000); doi: 10.1117/12.404758; https://doi.org/10.1117/12.404758
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