Separation of volatile and nonvolatile deposits on real-time SAW NVR detectors

Kenneth T. Luey; Dianne J. Coleman; Joseph C. Uht

doi:10.1117/12.400823

20 September 2000 Separation of volatile and nonvolatile deposits on real-time SAW NVR detectors

Kenneth T. Luey, Dianne J. Coleman, Joseph C. Uht

Proceedings Volume 4096, Optical Systems Contamination and Degradation II: Effects, Measurements, and Control; (2000) https://doi.org/10.1117/12.400823
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

Real-time instruments based on surface acoustic wave (SAW) resonators are now seeing greater application for measuring the accumulation of nonvolatile residues (NVRs) on contamination sensitive surfaces. In this paper, we study the use of a desiccant, or dry GN+-2) to remove volatile films from the SAW sensing surfaces, with the intent of leaving the NVR behind. Using water as moderately volatile model material, the SAW device was capable of indicating monolayer growth in agreement with the expected frequency change. The drying agent was successful in removing all water from the SAW device. Additionally, the SAW device was capable of detecting different regimes of desorption kinetics. In trials of several candidates, only one example of NVR could be deposited, most likely a phthalate from flexible tubing heated beyond its working temperature. The deposit was so large that it overwhelmed subsequent observations of water desorption.

Citation Download Citation

Kenneth T. Luey, Dianne J. Coleman, and Joseph C. Uht "Separation of volatile and nonvolatile deposits on real-time SAW NVR detectors", Proc. SPIE 4096, Optical Systems Contamination and Degradation II: Effects, Measurements, and Control, (20 September 2000); https://doi.org/10.1117/12.400823

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