30 June 2000 Estimation of intrinsic stresses and elastic moduli in thin films
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Abstract
An approach is presented for the determination of the residual stresses and elastic moduli of particle systems resulting from computer simulations of particle or atomic deposition. The proposed technique is based on fundamental concepts of elasticity and is capable of capturing the variation of stresses and moduli as functions of position within the system. Application to a perfect FCC crystal and a simple particle system is demonstrated.
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Pedro C. Andia, Pedro C. Andia, Francesco Costanzo, Francesco Costanzo, Gary L. Gray, Gary L. Gray, } "Estimation of intrinsic stresses and elastic moduli in thin films", Proc. SPIE 4097, Complex Mediums, (30 June 2000); doi: 10.1117/12.390587; https://doi.org/10.1117/12.390587
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