29 September 2000 Facility for the curvature-based measurement of the nanotopography of complex surfaces
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Abstract
An apparatus for measuring the topographies of complex surfaces with high accuracy by curvature scanning has been setup. For this purpose, a new type of curvature sensor that processes information from a relatively large area of the surface under test is moved along the surface. The principles advantages and a technical realization of this method referred to as large-area curvature scanning will be presented.
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Peter Thomsen-Schmidt, Peter Thomsen-Schmidt, Michael Schulz, Michael Schulz, Ingolf Weingaertner, Ingolf Weingaertner, } "Facility for the curvature-based measurement of the nanotopography of complex surfaces", Proc. SPIE 4098, Optical Devices and Diagnostics in Materials Science, (29 September 2000); doi: 10.1117/12.401615; https://doi.org/10.1117/12.401615
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