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29 September 2000 Reliable curvature sensor for measuring the topography of complex surfaces
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Abstract
The problem of measuring steep aspheres with high accuracy has not yet been generally solved. In this presentation, a particular sensor type is presented which can be used to measure the form of optically smooth surfaces with no restrictions as regards lateral extent or complexity. It is a curvature sensor which can be guided along the surface. Curvature is an intrinsic property of the artifacts, which is independent of its position and angular orientation.
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Michael Schulz, Peter Thomsen-Schmidt, and Ingolf Weingaertner "Reliable curvature sensor for measuring the topography of complex surfaces", Proc. SPIE 4098, Optical Devices and Diagnostics in Materials Science, (29 September 2000); https://doi.org/10.1117/12.401614
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