Evaluating optical and supersmooth surface using AFM in optical maunfacturing technology

Jianbai Li; Shaorong Xiao; Xiaoyun Li; Aihan Ying; Anqing Zhao

doi:10.1117/12.405836

2 November 2000 Evaluating optical and supersmooth surface using AFM in optical maunfacturing technology

Jianbai Li; Shaorong Xiao; Xiaoyun Li; Aihan Ying; Anqing Zhao;

Author Affiliations +

Proceedings Volume 4099, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries; (2000) https://doi.org/10.1117/12.405836
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

In this paper, a testing method for optical polished surface in level instrumentation and supersmooth surface in soft x- ray system using Atomic Force Microscope (AFM) is presented, and some testing results reached to nanometer RMS are listed. In the paper it is indicated that, different size of polished platforms are formed as difference of optical polished method and period. Important applications of AFM testing method for improving optical polished technology and obtaining supersmooth surface are introduced in the paper.

Citation Download Citation

Jianbai Li, Shaorong Xiao, Xiaoyun Li, Aihan Ying, Anqing Zhao, "Evaluating optical and supersmooth surface using AFM in optical maunfacturing technology", Proc. SPIE 4099, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries, (2 November 2000); doi: 10.1117/12.405836; https://doi.org/10.1117/12.405836

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