Paper
2 November 2000 Evaluating optical and supersmooth surface using AFM in optical maunfacturing technology
Jianbai Li, Shaorong Xiao, Xiaoyun Li, Aihan Ying, Anqing Zhao
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Abstract
In this paper, a testing method for optical polished surface in level instrumentation and supersmooth surface in soft x- ray system using Atomic Force Microscope (AFM) is presented, and some testing results reached to nanometer RMS are listed. In the paper it is indicated that, different size of polished platforms are formed as difference of optical polished method and period. Important applications of AFM testing method for improving optical polished technology and obtaining supersmooth surface are introduced in the paper.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jianbai Li, Shaorong Xiao, Xiaoyun Li, Aihan Ying, and Anqing Zhao "Evaluating optical and supersmooth surface using AFM in optical maunfacturing technology", Proc. SPIE 4099, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries, (2 November 2000); https://doi.org/10.1117/12.405836
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Cited by 1 scholarly publication.
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KEYWORDS
Surface finishing

Polishing

Coating

Optical components

Optics manufacturing

Surface roughness

Testing and analysis

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