26 September 2000 Design problems of a calibrated BRDF sensor with respect to dynamic range, speed, and large angle of view
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Abstract
This paper deals with applications of angle resolved light scatter (ARS) measurements as well as with the discussion of design and application problems of ARS sensors. The first section gives a description of the experimental sensor setup. In the second section of the paper two applications will be outlined, firstly particle detection on smooth Si surfaces, and secondly defect detection in small Si v-grooves. In the third section of the paper principal drawbacks of the experimental ARS sensor and their elimination will be discussed.
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Thomas Rinder, Hendrik Rothe, Andre Kasper, "Design problems of a calibrated BRDF sensor with respect to dynamic range, speed, and large angle of view", Proc. SPIE 4100, Scattering and Surface Roughness III, (26 September 2000); doi: 10.1117/12.401653; https://doi.org/10.1117/12.401653
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