Measuring surface roughness in transmission geometry

Vladimir K. Ignatovich

doi:10.1117/12.401659

26 September 2000 Measuring surface roughness in transmission geometry

Vladimir K. Ignatovich

Proceedings Volume 4100, Scattering and Surface Roughness III; (2000) https://doi.org/10.1117/12.401659
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

Scattering of slow neutron or x-rays on roughness in geometry of total reflection is considered. Part of radiation scattered on roughnesses at the front interface of a plane sample penetrates into the sample and outgoes through its back and edge surfaces. Theory for calculation of angular distribution of transmitted radiation after such a scattering is presented. It is shown that there is a range of angles below the critical one, which does not contain transmitted radiation. If, nevertheless, the radiation is present in this range, it gives information about additional scattering of transmitted radiation on the back surface roughnesses.

Citation Download Citation

Vladimir K. Ignatovich "Measuring surface roughness in transmission geometry", Proc. SPIE 4100, Scattering and Surface Roughness III, (26 September 2000); https://doi.org/10.1117/12.401659

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