26 September 2000 Rapid detection of surface defects by x-ray scanning
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A new device for rapid non-contact characterization of roughness spatial distribution of flat surfaces is developed. Its operational principle is based on the strong dependence on roughness of the intensity of x-rays reflected from a superpolished surface. This effect may be used to obtain a two-dimensional map of the roughness spatial distribution for flat surfaces with a rms, roughness height of the order of one nanometre. The key components of this device are a precision mechanical one-dimensional scanning stage, a parabolic collimator with vacuum beam path, and a temperature stabilized cooled x-ray linear detector array.
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Vladimir V. Protopopov, Vladimir V. Protopopov, Kamil A. Valiev, Kamil A. Valiev, Rafik M. Imamov, Rafik M. Imamov, } "Rapid detection of surface defects by x-ray scanning", Proc. SPIE 4100, Scattering and Surface Roughness III, (26 September 2000); doi: 10.1117/12.401657; https://doi.org/10.1117/12.401657


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