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7 March 2006 Estimation of inside stress of microcantilever: investigation of measuring principle using macro-model
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Abstract
A measurement system constructed with a micro Fizeau interferometer and the spatial fringe analysis method is proposed to measure precisely a deflection of microstructures. The results of the deflection are given as the boundary condition of a FEM. A stress in the element is analyzed by the FEM. To confirm the validity of the principle, the experiment is performed with a macro model. The measuring optical system for the macro model is constructed with a projection moire system. Without any contacts, the stress map in the element can be estimated by this method. Comparing the result from this method with the result by strain gauges, it confirms that the accuracy of the estimation of the stress is less than 5 MPa in the macro model. On basis of results in the macro model, a stress in a micro cantilever can also be estimated.
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Yasuhiko Arai and Shunsuke Yokozeki "Estimation of inside stress of microcantilever: investigation of measuring principle using macro-model", Proc. SPIE 4101, Laser Interferometry X: Techniques and Analysis, (7 March 2006); https://doi.org/10.1117/12.498436
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