7 March 2006 Measurement and control of the bending of x-ray mirrors using speckle interferometry
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Abstract
Speckle interferometry (SI) is used for the measurement of the shape change of x-ray mirrors. Initially flat under thermal equilibrium, the mirror, or "thermal bender", is deliberately and adaptively bent by means of well-controlled temperature gradients. As the deflection of an optically polished surface can be obtained by a number of methods, the choice of SI and its subsequent advantages are discussed. Quantitative results are reported, referring to four kinds of tests: conformity, stability, sensitivity and repeatability tests. SI is recognized to meet the expectations: it provides a simple, complete, sensitive and accurate control of the shape of the bent x-ray mirrors.
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Pierre M. Jacquot, Massimo Facchini, Muriel Mattenet, Gerhard Gruebel, "Measurement and control of the bending of x-ray mirrors using speckle interferometry", Proc. SPIE 4101, Laser Interferometry X: Techniques and Analysis, (7 March 2006); doi: 10.1117/12.498444; https://doi.org/10.1117/12.498444
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KEYWORDS
Mirrors

X-rays

Speckle interferometry

Surface finishing

Interferometry

Polishing

Reflection

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