7 March 2006 Three-dimensional profilometry with interference microscope using wavelength-to-depth encoding
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Abstract
An interference microscope based on a wavelength-to-depth encoding technique is presented. The wavelength-to-depth encoding is realized by using a diffractive lens and wavelength tuning. The coherence degree of the interference fields versus wavelength is analyzed. A depth discrimination of 0.71µm is obtained with 0.90 NA objective lenses. Experimental results of a four-level grating measurement are presented with results are comparable to those obtained with a Dektak profilometer and the same interference microscope using mechanical depth-scanning. The system is promising for fast, noncontact, high- resolution three-dimensional imaging.
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Guoqiang Li, Guoqiang Li, Pang Chen Sun, Pang Chen Sun, Yeshaiahu Fainman, Yeshaiahu Fainman, Paul C. Lin, Paul C. Lin, } "Three-dimensional profilometry with interference microscope using wavelength-to-depth encoding", Proc. SPIE 4101, Laser Interferometry X: Techniques and Analysis, (7 March 2006); doi: 10.1117/12.498380; https://doi.org/10.1117/12.498380
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