7 March 2006 Three-dimensional profilometry with interference microscope using wavelength-to-depth encoding
Author Affiliations +
An interference microscope based on a wavelength-to-depth encoding technique is presented. The wavelength-to-depth encoding is realized by using a diffractive lens and wavelength tuning. The coherence degree of the interference fields versus wavelength is analyzed. A depth discrimination of 0.71µm is obtained with 0.90 NA objective lenses. Experimental results of a four-level grating measurement are presented with results are comparable to those obtained with a Dektak profilometer and the same interference microscope using mechanical depth-scanning. The system is promising for fast, noncontact, high- resolution three-dimensional imaging.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Guoqiang Li, Guoqiang Li, Pang Chen Sun, Pang Chen Sun, Yeshaiahu Fainman, Yeshaiahu Fainman, Paul C. Lin, Paul C. Lin, } "Three-dimensional profilometry with interference microscope using wavelength-to-depth encoding", Proc. SPIE 4101, Laser Interferometry X: Techniques and Analysis, (7 March 2006); doi: 10.1117/12.498380; https://doi.org/10.1117/12.498380

Back to Top