17 November 2000 Free-space micro-optical intra-MCM interconnection modules: performances, potentialities, and limitations
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We design and realize a scalable multi-channel free-space interconnection prototype with the potential for Tb/s.cm2 aggregate bit rate capacity over inter- and intra-MCM interconnection distances. The component is prototyped in a high quality optical plastic, PMMA, using deep lithography with protons. At present data communication is achieved at 622 Mb/s per channel with a BER smaller than 10-13 for the 16 channels with inter-channel cross-talks as low as -22dB. We perform a sensitivity analysis for misalignments and study the impact of fabrication errors on the performance of the interconnection module in case injection moulding would be the preferred mass-fabrication technique. We provide evidence that these modules can be mass-fabricated with the required precision in optical plastics suited for heterogeneous integration with semiconductor materials.
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Valerie Baukens, Valerie Baukens, Christof Debaes, Christof Debaes, Michael Vervaeke, Michael Vervaeke, Heidi Ottevaere, Heidi Ottevaere, Bart Volckaerts, Bart Volckaerts, Pedro Vynck, Pedro Vynck, Patrik Tuteleers, Patrik Tuteleers, Alex Hermanne, Alex Hermanne, Jan M. Van Campenhout, Jan M. Van Campenhout, Mike Hanney, Mike Hanney, Irina P. Veretennicoff, Irina P. Veretennicoff, Hugo Thienpont, Hugo Thienpont, } "Free-space micro-optical intra-MCM interconnection modules: performances, potentialities, and limitations", Proc. SPIE 4109, Critical Technologies for the Future of Computing, (17 November 2000); doi: 10.1117/12.409224; https://doi.org/10.1117/12.409224

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