Surface and defect analysis using spatial light modulators

Hans J. Tiziani; Tobias Haist

doi:10.1117/12.405865

2 November 2000 Surface and defect analysis using spatial light modulators

Hans J. Tiziani, Tobias Haist

Proceedings Volume 4113, Algorithms and Systems for Optical Information Processing IV; (2000) https://doi.org/10.1117/12.405865
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

Current trends in optical defect detection and surface analysis using spatial light modulators are discussed. Examples for microscopic as well as macroscopic measurements in two and three dimensions are shown. Results for adaptive fringe projection in combination with moire, for adaptive illumination for two-dimensional image processing, and for the detection of defects in periodic media will be presented. We also report on improved correlation methods for position detection.

Citation Download Citation

Hans J. Tiziani and Tobias Haist "Surface and defect analysis using spatial light modulators", Proc. SPIE 4113, Algorithms and Systems for Optical Information Processing IV, (2 November 2000); https://doi.org/10.1117/12.405865

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