2 November 2000 Surface and defect analysis using spatial light modulators
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Current trends in optical defect detection and surface analysis using spatial light modulators are discussed. Examples for microscopic as well as macroscopic measurements in two and three dimensions are shown. Results for adaptive fringe projection in combination with moire, for adaptive illumination for two-dimensional image processing, and for the detection of defects in periodic media will be presented. We also report on improved correlation methods for position detection.
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Hans J. Tiziani, Hans J. Tiziani, Tobias Haist, Tobias Haist, } "Surface and defect analysis using spatial light modulators", Proc. SPIE 4113, Algorithms and Systems for Optical Information Processing IV, (2 November 2000); doi: 10.1117/12.405865; https://doi.org/10.1117/12.405865

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