15 December 2000 256 x 290 diffractive microlens array monolithic integration with PtSi focal plane array
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Abstract
256x290 diffractive microlens arrays have been designed by considering the correlative optical and processing parameters for PtSi focal plane array. The microlens arrays were designed to operate at (lambda) equals4micrometers , with a lens size of 50micrometers x33micrometers and the lens speed f/2.1 located on the backside of PtSi focal plane array chip. The diffractive microlens arrays have been fabricated on the backside of PtSi focal plane array chip by successive photolithography and Ar+ ion-beam etching technique. The alignment of microlens arrays with PtSi focal plane array was completed by a backside aligner with IR light source. The practical processes and fabrication method are discussed. The optical characteristics and performance parameters of PtSi FPA with diffractive microlens arrays are presented.
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Yi Li, Yi Li, Taoyuan Hu, Taoyuan Hu, Xinjian Yi, Xinjian Yi, Liping Cai, Liping Cai, Miao He, Miao He, Sixiang Chen, Sixiang Chen, } "256 x 290 diffractive microlens array monolithic integration with PtSi focal plane array", Proc. SPIE 4130, Infrared Technology and Applications XXVI, (15 December 2000); doi: 10.1117/12.409835; https://doi.org/10.1117/12.409835
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