15 December 2000 Long linear MWIR and LWIR HgCdTe arrays for high-resolution imaging
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Abstract
High resolution infrared imaging system calls for very long scanning arrays with several thousands of detectors and high performance. This paper presents the technological developments and the electro-optical performance obtained at LETI/SLIR (Infrared Laboratory) on linear HgCdTe (MCT) arrays working in the 3-5, 8-10 and 11-12.5 micrometers spectral ranges. These large arrays have an indirect hybrid architecture composed of butted HgCdTe PV detection circuits and Si readouts hybridized on a mechanically close-matched fanout substrate. Defect free dicing and butting, respecting the detector pitch, is made by accurate and nondamaging techniques.
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Jean-Paul Chamonal, Jean-Paul Chamonal, Eric Mottin, Eric Mottin, Patrick Audebert, Patrick Audebert, Michel Ravetto, Michel Ravetto, Marcel Caes, Marcel Caes, Jean-Pierre Chatard, Jean-Pierre Chatard, } "Long linear MWIR and LWIR HgCdTe arrays for high-resolution imaging", Proc. SPIE 4130, Infrared Technology and Applications XXVI, (15 December 2000); doi: 10.1117/12.409886; https://doi.org/10.1117/12.409886
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