Translator Disclaimer
15 December 2000 Single- and two-color infrared focal plane arrays made by MBE in HgCdTe
Author Affiliations +
We present here recent developments obtained at LETI infrared laboratory in the field of infrared detectors made in HgCdTe material and using the molecular beam epitaxial growth technique (MBE). We discuss the metallurgical points (growth temperature and flux control) that lead to achieve excellent quality epitaxial layers grown by MBE. We show a run-to-run reproducibility measured on growth run of more than 15 layers. The crystalline quality, surface morphology, and composition uniformity are excellent. The etch pits density (EPD) are in the low when HgCdTe grows on a CdZnTe substrate. Transport properties reveal a low n-type carrier concentration in the 1014 to range with a carrier mobility in excess of 105 cm2/V/sec at 77K for epilayers grown with 10 micrometers cutoff wavelength. We describe the performances of several kinds of our HgCdTe- MBE devices: single color MWIR and LWIR detectors on HgCdTe/CdZnTe operating at 77K in respectively (3-5 micrometers ) and (8-12 micrometers ) wavelength range; single color MWIR detectors on HgCdTe grown on germanium heterosubstrate operating at 77K in the (3-5 micrometers ) wavelength range; two color HgCdTe detectors operating within the MWIR (3-5 micrometers ) band.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jean-Paul Zanatta, P. Ferret, R. Loyer, G. Petroz, S. Cremer, Jean-Paul Chamonal, Philippe Bouchut, Alain Million, and Gerard L. Destefanis "Single- and two-color infrared focal plane arrays made by MBE in HgCdTe", Proc. SPIE 4130, Infrared Technology and Applications XXVI, (15 December 2000);


Advanced MCT technologies in France
Proceedings of SPIE (May 14 2007)
256x256 HgCdTe MWIR array grown on Ge substrates
Proceedings of SPIE (July 22 1998)
IR focal planes based on GaInSb/InAs superlattices
Proceedings of SPIE (October 22 1996)
Megapixel HgCdTe MWIR focal plane array with a 15 um...
Proceedings of SPIE (February 19 2004)

Back to Top