Single- and two-color infrared focal plane arrays made by MBE in HgCdTe

Jean-Paul Zanatta; P. Ferret; R. Loyer; G. Petroz; S. Cremer; Jean-Paul Chamonal; Philippe Bouchut; Alain Million; Gerard L. Destefanis

doi:10.1117/12.409885

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15 December 2000 Single- and two-color infrared focal plane arrays made by MBE in HgCdTe

Jean-Paul Zanatta, P. Ferret, R. Loyer, G. Petroz, S. Cremer, Jean-Paul Chamonal, Philippe Bouchut, Alain Million, Gerard L. Destefanis

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Proceedings Volume 4130, Infrared Technology and Applications XXVI; (2000) https://doi.org/10.1117/12.409885
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

We present here recent developments obtained at LETI infrared laboratory in the field of infrared detectors made in HgCdTe material and using the molecular beam epitaxial growth technique (MBE). We discuss the metallurgical points (growth temperature and flux control) that lead to achieve excellent quality epitaxial layers grown by MBE. We show a run-to-run reproducibility measured on growth run of more than 15 layers. The crystalline quality, surface morphology, and composition uniformity are excellent. The etch pits density (EPD) are in the low 10⁵.cm^-2 when HgCdTe grows on a CdZnTe substrate. Transport properties reveal a low n-type carrier concentration in the 10¹⁴ to 10¹⁵.cm^-3 range with a carrier mobility in excess of 10⁵ cm²/V/sec at 77K for epilayers grown with 10 micrometers cutoff wavelength. We describe the performances of several kinds of our HgCdTe- MBE devices: single color MWIR and LWIR detectors on HgCdTe/CdZnTe operating at 77K in respectively (3-5 micrometers ) and (8-12 micrometers ) wavelength range; single color MWIR detectors on HgCdTe grown on germanium heterosubstrate operating at 77K in the (3-5 micrometers ) wavelength range; two color HgCdTe detectors operating within the MWIR (3-5 micrometers ) band.

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Jean-Paul Zanatta, P. Ferret, R. Loyer, G. Petroz, S. Cremer, Jean-Paul Chamonal, Philippe Bouchut, Alain Million, and Gerard L. Destefanis "Single- and two-color infrared focal plane arrays made by MBE in HgCdTe", Proc. SPIE 4130, Infrared Technology and Applications XXVI, (15 December 2000); https://doi.org/10.1117/12.409885

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