Vapor phase epitaxy growth of CdTe epilayers for RT x-ray detectors

Nico Lovergine; A. M. Mancini; P. Prete; Adriano Cola; Leander Tapfer

doi:10.1117/12.407582

21 November 2000 Vapor phase epitaxy growth of CdTe epilayers for RT x-ray detectors

Nico Lovergine, A. M. Mancini, P. Prete, Adriano Cola, Leander Tapfer

Proceedings Volume 4141, Hard X-Ray, Gamma-Ray, and Neutron Detector Physics II; (2000) https://doi.org/10.1117/12.407582
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

We report on the growth of thick CdTe layers on ZnTe/(100) GaAs hybrid substrates by the novel H₂ transport vapor phase epitaxy (H₂T-VPE) method. High crystalline quality (100)-oriented CdTe single crystal epilayers can be fabricated under atmospheric pressure and at growth temperatures (T_D) in the 600 - 800 degree Celsius interval. Double crystal X-ray diffraction measurements performed on epilayers thicker than 30 micrometer show CdTe (400) peaks with FWHM < 59 arcsec. Samples grown under optimized conditions exhibit mirror-like surfaces. Nominally undoped epilayers grown < 650 degrees Celsius are p-type and low resistive, but they turn n-type above 650 degrees Celsius, as a result of donor (likely Ga) diffusion from the substrate. RT resistivities ((rho) ) approximately 10⁶ (Omega) (DOT)cm are obtained for 675 degrees Celsius < T_D < 700 degrees Celsius, but (rho) decreases for higher temperatures and thinner samples. Layers grown under these conditions show RT electron concentrations in the 10¹⁴ - 10¹¹ cm^-3 range. The detection capability of H₂T-VPE grown CdTe is demonstrated by time- of-flight measurements performed at RT on Au/n-CdTe/n⁺- GaAs diode structures under reverse bias conditions. The present results show the potentials of H₂T-VPE for the growth of detector-grade CdTe.

Citation Download Citation

Nico Lovergine, A. M. Mancini, P. Prete, Adriano Cola, and Leander Tapfer "Vapor phase epitaxy growth of CdTe epilayers for RT x-ray detectors", Proc. SPIE 4141, Hard X-Ray, Gamma-Ray, and Neutron Detector Physics II, (21 November 2000); https://doi.org/10.1117/12.407582

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