Future metrology needs for FEL reflective optics

Lahsen Assoufid

doi:10.1117/12.413685

25 January 2001 Future metrology needs for FEL reflective optics

Lahsen Assoufid

Proceedings Volume 4143, X-Ray FEL Optics and Instrumentation; (2001) https://doi.org/10.1117/12.413685
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

An International Workshop on Metrology for X-ray and Neutron Optics has been held March 16-17,2000, at the Advanced Photon Source, Argonne National Laboratory near Chicago, Illinois (USA). The workshop gathered engineers and scientist from both the U.S. and around the world to evaluate the metrology instrumentation and methods used to characterize surface figure and finish for long grazing incidence optics used in beamlines at synchrotron radiation sources. This two-day workshop was motivated by the rapid evolution in the performance of x-ray and neutron sources along with requirements in optics figure and finish. More specifically, the performance of future light sources, such as free-electron laser (FEL)-based x-ray sources, is being pushed to new limits in term of both brilliance and coherence. As a consequence, tolerances on surface figure and finish of the next generation of optics are expected to become tighter. The timing of the workshop provided an excellent opportunity to study the problem, evaluate the state of the art in metrology instrumentation, and stimulate innovation on future metrology instruments and techniques to be used to characterize these optics.

Citation Download Citation

Lahsen Assoufid "Future metrology needs for FEL reflective optics", Proc. SPIE 4143, X-Ray FEL Optics and Instrumentation, (25 January 2001); https://doi.org/10.1117/12.413685

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