2 November 2000 Accurate multilayer period determination with laser plasma water-window reflectometer
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Abstract
This paper describes a new method for improved determination of multilayer period using a soft x-ray reflectometer based on a line-emitting high-brightness water-window liquid-jet laser- plasma source. The use of line emission with well-known wavelengths allows accurate measurements of multilayer period without source monochromatization and calibration. By using a new multi-line data analysis procedure the multilayer period of W/B4C mirrors can be determined with an accuracy of 0.001 nm.
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Goeran A. Johansson, Magnus Berglund, Fredrik Eriksson, Jens Birch, Hans M. Hertz, "Accurate multilayer period determination with laser plasma water-window reflectometer", Proc. SPIE 4144, Advances in Laboratory-based X-Ray Sources and Optics, (2 November 2000); doi: 10.1117/12.405907; https://doi.org/10.1117/12.405907
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