2 November 2000 Capillary discharge plasmas as a source of EUV and soft x-ray radiation
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Abstract
A compact device, based on fast capillary discharge plasmas, is used as an intense EUV and soft x-ray source of radiation. The plasma is created by a discharge of low-inductance capacitors (30 nF) through a capillary (2 mm diameter, 20 mm length). Two types of capillary are used: a polyacetal (empty) and a gas-filled (Ar, Xe). All components are assembled in a coaxial geometry. The total size of the device including capacitors, switch and capillary is 30 cm long and 25 cm in diameter. Discharge current is monitored using a shunt circuit.
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Alexander P. Shevelko, Alexander P. Shevelko, Larry V. Knight, Larry V. Knight, Oleg F. Yakushev, Oleg F. Yakushev, } "Capillary discharge plasmas as a source of EUV and soft x-ray radiation", Proc. SPIE 4144, Advances in Laboratory-based X-Ray Sources and Optics, (2 November 2000); doi: 10.1117/12.405905; https://doi.org/10.1117/12.405905
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