Microfocus soft x-ray source generated by a compact high-power laser plasma

I. C. Edmond Turcu; Harry Rieger; Yuli Vladimirsky; Robert K. Grygier; Michael F. Powers; Joe R. Naunguyan; S. M. Campeau; G. French; Richard Alan Forber; Richard M. Foster

doi:10.1117/12.405882

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2 November 2000 Microfocus soft x-ray source generated by a compact high-power laser plasma

I. C. Edmond Turcu, Harry Rieger, Yuli Vladimirsky, Robert K. Grygier, Michael F. Powers, Joe R. Naunguyan, S. M. Campeau, G. French, Richard Alan Forber, Richard M. Foster

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Proceedings Volume 4144, Advances in Laboratory-based X-Ray Sources and Optics; (2000) https://doi.org/10.1117/12.405882
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

A high power picosecond soft x-ray source is generated by a compact, modular, diode pumped solid state laser BriteLight^TM. Three x-ray source version are constructed from laser modules with increasing power. The power of the x-ray sources is tailored to potential applications. The building block of such a modular system is a 3 Watt x-ray power source with 1.1 keV x-ray photon energy. The laser system is very compact with dimensions of 4 ft X 3 ft X 1 fit. It is composed of a laser master oscillator, pre-amplifier and one power amplifier. A four laser amplifier system was also constructed in order to generate 12 W of x-rays for application to x-ray lithography.

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I. C. Edmond Turcu, Harry Rieger, Yuli Vladimirsky, Robert K. Grygier, Michael F. Powers, Joe R. Naunguyan, S. M. Campeau, G. French, Richard Alan Forber, and Richard M. Foster "Microfocus soft x-ray source generated by a compact high-power laser plasma", Proc. SPIE 4144, Advances in Laboratory-based X-Ray Sources and Optics, (2 November 2000); https://doi.org/10.1117/12.405882

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