Paper
5 January 2001 MOXI: a novel microfabricated zoom lens for x-ray imaging
Philip D. Prewett, Alan G. Michette
Author Affiliations +
Abstract
Conventional x-ray optics have low optical efficiency and wavelength dependent focusing. The use of grazing incidence reflective optics overcomes these problems and significant progress has been made using polycapillary systems based on commercial microchannel plates originally designed as electron multipliers. Microfabrication techniques, under development for microelectromechanical systems (MEMS), provide a means of making arrays of microchannels with radial symmetry for a wide range of x-ray optical applications. The focal length of such micro-optical arrays may be varied to provide a zoom lens capability.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Philip D. Prewett and Alan G. Michette "MOXI: a novel microfabricated zoom lens for x-ray imaging", Proc. SPIE 4145, Advances in X-Ray Optics, (5 January 2001); https://doi.org/10.1117/12.411635
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CITATIONS
Cited by 10 scholarly publications.
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KEYWORDS
X-rays

X-ray optics

Nickel

Microfabrication

Silicon

Reflectivity

X-ray imaging

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