8 November 2000 High-resolution soft x-ray microscopy
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Abstract
The XM-1 is a soft x-ray full-field microscope that uses zone plates for the condenser and objective lenses. One of the main features of XM-1 is the high spatial resolution, which is made possible by the fine features of the objective zone plate. At present, the microscope uses a zone plate with an outer zone width of 25 nm. Several test patterns containing periodic lines and spaces were fabricated to measure the resolution of the microscope. Experimental data shows that the microscope can resolved 25 nm features. As simulations indicate that good contrast can be observed with even smaller features, test patterns with finer features are being fabricated to actually determine the resolution limit of the microscope.
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Weilun Chao, Weilun Chao, Erik H. Anderson, Erik H. Anderson, Gregory Denbeaux, Gregory Denbeaux, Bruce D. Harteneck, Bruce D. Harteneck, Mark A. LeGros, Mark A. LeGros, Angelic L. Pearson, Angelic L. Pearson, Deirdre L. Olynick, Deirdre L. Olynick, David T. Attwood, David T. Attwood, } "High-resolution soft x-ray microscopy", Proc. SPIE 4146, Soft X-Ray and EUV Imaging Systems, (8 November 2000); doi: 10.1117/12.406671; https://doi.org/10.1117/12.406671
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