Paper
8 November 2000 Multilayer reflectance during exposure to EUV radiation
Sebastian Oestreich, Roman Klein, Frank Scholze, Jeroen Jonkers, Eric Louis, Andrey E. Yakshin, Peter C. Goerts, Gerhard Ulm, Markus Haidl, Fred Bijkerk
Author Affiliations +
Abstract
Mo/S multilayer mirrors have been exposed to intense monochromatic EUV radiation in order to investigate a possible deterioration of the mirror reflectance under different vacuum conditions. Power densities up to 3 mW/mm2 were applied at the PB undulator beamline at BESSY II, applying a hydrocarbon enriched vacuum. The mirror reflectance has been monitored in situ during several hours of exposure. Vacuum pressures of 3 X 10-8 mbar (without hydrocarbons) and 10-7 mbar (with hydrocarbons) at EUV intensities of 3 mW/mm2, respectively 0.2 mW/mm2 have been applied. The reflectance of the mirrors decreased when exposed to EUV radiation in hydrocarbon enriched vacuum, while no loss in reflectance was observed when no hydrocarbons were added to the vacuum. Ozone-cleaning experiments, using UV produced ozone from air at atmospheric pressure, were performed and show that Mo/S mirrors do not suffer from prolonged exposure to ozone.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sebastian Oestreich, Roman Klein, Frank Scholze, Jeroen Jonkers, Eric Louis, Andrey E. Yakshin, Peter C. Goerts, Gerhard Ulm, Markus Haidl, and Fred Bijkerk "Multilayer reflectance during exposure to EUV radiation", Proc. SPIE 4146, Soft X-Ray and EUV Imaging Systems, (8 November 2000); https://doi.org/10.1117/12.406677
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Cited by 18 scholarly publications.
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KEYWORDS
Mirrors

Reflectivity

Extreme ultraviolet lithography

Ozone

Multilayers

Contamination

Extreme ultraviolet

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