30 January 2001 Advances in laser-ablation-assisted processes
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Proceedings Volume 4157, Laser-Assisted Microtechnology 2000; (2001) https://doi.org/10.1117/12.413767
Event: Laser-Assisted Microtechnology 2000, 2000, St. Petersburg-Pushkin, Russian Federation
Abstract
Recent advances in hybrid technologies combining pulsed laser ablation with non-pulsed plasma sources are discussed. One was a deposition of multi phase materials made of nanocrystalline TiC, WC, WS2, and amorphous diamond-like carbon by a hybrid of laser ablation and magnetron sputtering. These phases were combined into layered and grain/matrix nano-composite materials, using the laser ablated plasma for low temperature synthesis of crystalline materials. Another was the production of AlON film by the laser ablation of Al2O3 accompanied by a nitrogen ion beam, where synergistic interaction between the two plasma sources provided the generation of chemically active NO molecules critical for the growth of AlON films. In both hybrid process, the high energy, excitation level, and short duration of the laser ablated plasma were the key factors that enabled production of material with composition, structure, and properties unobtainable by other deposition.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. A. Voevodin, A. A. Voevodin, Jeffrey S. Zabinski, Jeffrey S. Zabinski, } "Advances in laser-ablation-assisted processes", Proc. SPIE 4157, Laser-Assisted Microtechnology 2000, (30 January 2001); doi: 10.1117/12.413767; https://doi.org/10.1117/12.413767
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