30 January 2001 Industrial aspects of Nd-YAG laser microprocessing
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Proceedings Volume 4157, Laser-Assisted Microtechnology 2000; (2001) https://doi.org/10.1117/12.413743
Event: Laser-Assisted Microtechnology 2000, 2000, St. Petersburg-Pushkin, Russian Federation
Abstract
For the last decade processing application with the Nd:YAG laser operating int eh UV, visible and IR region has taken a new dynamic turn in the micro technology. It has covered a wide range of applications in microelectronics, semiconductors and screen printing as well as in the medical industries. From laser ablation to marking and from precision cutting to micro welding, it has opened a new horizon of industrial needs in micro technology. Of these, processing with the UV radiations have a unique characteristics of ablation and allow the production of small micrometers order microstructures, but their industrial application has yet to be established. On the contrary, processing with the IR radiations usually considered as thermal processing covers mainly precision cutting of stencil mask for screen printing technology, micro processing of metallic stents for medical therapy and various other microstructuring applications. In all these processes, due to different scale length of the beam interaction time with the material, various physical phenomenon are encountered that ultimately affect the quality of the end product. The present paper elaborates a few of these basic processes and explores the possibilities of current and new application areas.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yash P. Kathuria, "Industrial aspects of Nd-YAG laser microprocessing", Proc. SPIE 4157, Laser-Assisted Microtechnology 2000, (30 January 2001); doi: 10.1117/12.413743; https://doi.org/10.1117/12.413743
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