Laser-induced liquid phase deposition (LCLD): state of the art

Laszlo Nanai; Krisztian Kordas; Katalin Bali

doi:10.1117/12.413763

30 January 2001 Laser-induced liquid phase deposition (LCLD): state of the art

Laszlo Nanai, Krisztian Kordas, Katalin Bali

Proceedings Volume 4157, Laser-Assisted Microtechnology 2000; (2001) https://doi.org/10.1117/12.413763
Event: Laser-Assisted Microtechnology 2000, 2000, St. Petersburg-Pushkin, Russian Federation

Abstract

12 A review of results of a last few years investigation in the field of laser light induced liquid phase metal deposition on different substrates is presented. The role of liquid phase chemical deposition techniques represents a certain interest for contemporary micro technology because of its technical and economical advantages compared to other technics e.g. chemical vapor phase deposition. The methods do not require harmful precursors, complicated vacuum tools, and it is cost effective.

Citation Download Citation

Laszlo Nanai, Krisztian Kordas, and Katalin Bali "Laser-induced liquid phase deposition (LCLD): state of the art", Proc. SPIE 4157, Laser-Assisted Microtechnology 2000, (30 January 2001); https://doi.org/10.1117/12.413763

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