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30 January 2001 Laser-induced liquid phase deposition (LCLD): state of the art
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Proceedings Volume 4157, Laser-Assisted Microtechnology 2000; (2001) https://doi.org/10.1117/12.413763
Event: Laser-Assisted Microtechnology 2000, 2000, St. Petersburg-Pushkin, Russian Federation
Abstract
12 A review of results of a last few years investigation in the field of laser light induced liquid phase metal deposition on different substrates is presented. The role of liquid phase chemical deposition techniques represents a certain interest for contemporary micro technology because of its technical and economical advantages compared to other technics e.g. chemical vapor phase deposition. The methods do not require harmful precursors, complicated vacuum tools, and it is cost effective.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Laszlo Nanai, Krisztian Kordas, and Katalin Bali "Laser-induced liquid phase deposition (LCLD): state of the art", Proc. SPIE 4157, Laser-Assisted Microtechnology 2000, (30 January 2001); https://doi.org/10.1117/12.413763
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