30 January 2001 Laser microprocessing and its applications in the microelectronics industry
Author Affiliations +
Proceedings Volume 4157, Laser-Assisted Microtechnology 2000; (2001) https://doi.org/10.1117/12.413755
Event: Laser-Assisted Microtechnology 2000, 2000, St. Petersburg-Pushkin, Russian Federation
Laser micro processing technology has been applied to industries in a number of aspects: (1) laser cleaning, laser deflash and plasma-assisted laser micro processing, (2) laser texturing, laser bumping and related technologies, (3) real-time monitoring of laser surface processing, (4) laser- induced controllable periodic structures and (5) laser nano- etching and nano lithography by tip-enhanced laser irradiation.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yongfeng Lu, Yongfeng Lu, ZhongMin Ren, ZhongMin Ren, } "Laser microprocessing and its applications in the microelectronics industry", Proc. SPIE 4157, Laser-Assisted Microtechnology 2000, (30 January 2001); doi: 10.1117/12.413755; https://doi.org/10.1117/12.413755


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