Microfabrication using laser-induced photopolymerization

Katsumi Yamaguchi; Takeshi Nakamoto

doi:10.1117/12.413747

30 January 2001 Microfabrication using laser-induced photopolymerization

Katsumi Yamaguchi, Takeshi Nakamoto

Proceedings Volume 4157, Laser-Assisted Microtechnology 2000; (2001) https://doi.org/10.1117/12.413747
Event: Laser-Assisted Microtechnology 2000, 2000, St. Petersburg-Pushkin, Russian Federation

Abstract

This paper deals with the development of simple and practical methods for fabrication of micro parts using laser induced photopolymerization. Mask pattern transfer method is used for high aspect ratio parts. Focused laser beam writing method is used for both high aspect ratio parts and 3D parts. The accuracy of the solidified polymer when using these methods is examined. Various shapes of micro polymer structures are produced using these methods.

Citation Download Citation

Katsumi Yamaguchi and Takeshi Nakamoto "Microfabrication using laser-induced photopolymerization", Proc. SPIE 4157, Laser-Assisted Microtechnology 2000, (30 January 2001); https://doi.org/10.1117/12.413747

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