Laser processing is quite attractive for micromachining, microstructuring, and modification of materials. Conventional laser processing using IR, visible, or UV lasers, however, cannot realize precision microfabrication of advanced materials such as fused silica, quartz, sapphire, diamond, SiC, GaN, etc. Novel laser processing is recent topics for microprocessing of these materials. In this paper, such novel approaches are reviewed.
Koji Sugioka, Koji Sugioka,
"Overview of novel approaches for laser microfabrication of advanced materials", Proc. SPIE 4157, Laser-Assisted Microtechnology 2000, (30 January 2001); doi: 10.1117/12.413749; https://doi.org/10.1117/12.413749