25 August 2000 Design and fabrication of a micromechanical inverter
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Proceedings Volume 4174, Micromachining and Microfabrication Process Technology VI; (2000) https://doi.org/10.1117/12.396471
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
Abstract
A micromechanical switch, which can be used as a logic gate, is described in this paper. This switch consists of fixed input electrodes, output electrode, VCC/GND pad, and movable electrode suspended by crab-leg flexures. For mechanical switching of an electrical signal, an actuator driven by electrostatic force was used. Provided that a movable electrode is connected to VCC and a low input voltage or ground signal is applied to the fixed input electrodes and the movable electrode. The proposed micromechanical switch was fabricated by surface micromachining technology with 2 micrometers -thick poly-Si and the measured threshold voltage for ON/OFF switching was 23V.
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Kyoung-Soo Chae, Kyoung-Soo Chae, Seungoh Han, Seungoh Han, Minseok Song, Minseok Song, Sung W. Moon, Sung W. Moon, James Jungho Pak, James Jungho Pak, } "Design and fabrication of a micromechanical inverter", Proc. SPIE 4174, Micromachining and Microfabrication Process Technology VI, (25 August 2000); doi: 10.1117/12.396471; https://doi.org/10.1117/12.396471
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